Vapor Deposition

The Vapor Deposition L&D team is led by Dr. Mark Losego (


Vapor deposition is used extensively for the processing of semiconductors and microelectronics.

On the Vapor Deposition Team, students learn about vacuum equipment and work to construct a vacuum chamber and auxiliary equipment to build the MILL’s first high-quality vapor deposition tool.

The team also explores explores vapor deposition processes (depositing thin films of metals and dielectrics), creates simple devices, and measures various optical, structural, and electronic features.