Vapor Deposition

The Vapor Deposition L&D team is led by Dr. Mark Losego.


Vapor deposition is used extensively for the processing of semiconductors and microelectronics.

On the Vapor Deposition Team, students learn about vacuum equipment and work to construct a vacuum chamber and auxiliary equipment to build the MILL’s first high-quality vapor deposition tool. We have purchased ~$120K in parts to build a vapor deposition reactor (DC and RF Magnetron Sputtering).

The team also explores vapor deposition processes (depositing thin films of metals and dielectrics), creates simple devices, and measures various optical, structural, and electronic features.

The team will meet for about 1 hour/week.